Nature

A motion characteristics modeled angular position sensor by nonlinear transfer of differential capacitance for miniaturized scanning mirrors

In this paper, an angular position sensor (APS) designed for a resonant miniaturized scanning mirror (M-SM) is presented. The APS operates based on the principle of differential variable capacitance, ...
Nature

Investigation into electro mechanical behaviour of MEMS wing shaped dielectric capacitive pressure sensor conforming to set boundary conditions and sizing tolerances

Micro Electro Mechanical Systems (MEMS) based Capacitive Pressure Sensors (CPS) have shown their versatility and reliability in numerous applications. In this work, an innovative approach to optimize ...
EDN

Humidity Sensing—Capacitive sensing controllers in non-user-interface apps—Part II

As discussed in the first part of the article, the accuracy with which sensor capacitance can be measured using absolute capacitance measurement has a significant dependency on the accuracy of the ...